International Radiation Detectors, Inc.
SXUV Photodiodes with Directly Deposited
Filters
To avoid use of fragile freestanding thin filters
during XUV experiments particularly EUV lithography and
research, visible blind SXUV photodiodes with integrated
thin film filters have been developed. The table below lists
available SXUV diodes with different filter materials and
their passbands. These filtered diodes exhibit visible light
blocking of at least four orders of magnitude. Diodes with
higher visible light blocking can be specially selected if
required. IRD is continuously making SXUV diodes with many
different filters. Users are requested to contact us for
their special filter requirements.
The advantages of these integrated detector-filter devices
over presently used separate freestanding thin foil filters
and detectors are compactness, higher reliability, ease in
manufacturing and handling, more stable bandpass and
flexibility in design as the filter thicknesses are
determined by optical constants and not by the mechanical
strength requirement.
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